ISBN-10:
1558998659
ISBN-13:
9781558998650
Pub. Date:
01/01/2009
Publisher:
Materials Research Society
Advanced Metallization Conference 2005 (AMC 2005): Volume 21

Advanced Metallization Conference 2005 (AMC 2005): Volume 21

Hardcover

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Overview

Technical leaders from around the world gather here to discuss developments in the areas of interconnect performance, advanced metallization, low-dielectric constant materials, barrier metallization, atomic layer deposition, advanced packaging and vertical integration. Both current state-of-the-art and ongoing challenges associated with multilevel interconnect are addressed. Included are papers on the latest developments in the integration of low-dielectric constant materials with copper-based metallization, and advances in the understanding of means by which process- or stress-induced damage can be mitigated and reliability of the interconnect system improved. Additional contributions discuss the design, development and modeling of advanced on-chip and multichip interconnect architectures and real-world implementation of optimized designs, materials and processes for production of leading-edge microelectronic devices.

Product Details

ISBN-13: 9781558998650
Publisher: Materials Research Society
Publication date: 01/01/2009
Series: MRS Proceedings
Pages: 755
Product dimensions: 6.40(w) x 9.30(h) x 1.50(d)

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