Wafer Fabrication: Automatic Material Handling System

Wafer Fabrication: Automatic Material Handling System

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Overview

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Product Details

ISBN-13: 9783110487237
Publisher: De Gruyter
Publication date: 09/24/2018
Sold by: Barnes & Noble
Format: NOOK Book
Pages: 284
File size: 16 MB
Note: This product may take a few minutes to download.
Age Range: 18 Years

About the Author

Jie Zhang, Shanghai Jiaotong University, Shanghai, China

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